Magnetic bead nanoactuator

  • chair:

    Hartbaum, J. / Jakobs, P. / Wohlgemuth, J. / Silvestre, M. / Franzreb, M. / Kohl, M. (2012)
  • place:

    Microelectronic Engineering 98 (2012), 582–586
  • Date: 2012

  • Hartbaum, J. / Jakobs, P. / Wohlgemuth, J. / Silvestre, M. / Franzreb, M. / Kohl, M. (2012): „Magnetic bead nanoactuator“. In: Microelectronic Engineering 98 (2012), 582–586

Abstract

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This paper presents the development of nanoactuators of free-standing Ti beam cantilevers with inte- grated superparamagnetic (SPM) beads at their front end that allow a controlled deflection by an external magnetic field gradient. A process flow is investigated based on three-step electron-beam lithography, reactive ion etching and the deposition of functionalized magnetic beads.

While the thickness of the beams is 50 nm, the lateral dimensions are designed to be 400 nm, in order to carry beads of 360 nm size. Magnetization measurements confirm the superparamagnetic behaviour of the beads having a saturation magnetization of 63 kA/m. The position accuracy of multi-step electron beam lithography is about 10 nm, allowing an exact deposition of functionalized beads.