Polymerization of SU-8 under Irradiation Stimulated by Temperature Increase

  • chair:

    Naz´mov, V. / Berger, M. / Heissler, S. (2011)
  • place:

    Journal of Surface Investigation, X-ray, Synchrotron and Neutron Technologies, 6 (2011), 5, 1023-1027
  • Date: 2011

  • Naz´mov, V. / Berger, M. / Heissler, S. (2011): „Polymerization of SU-8 under Irradiation Stimulated by Temperature Increase“. In: Journal of Surface Investigation, X-ray, Synchrotron and Neutron Technologies, 6 (2011), 5, 1023-1027

Abstract

X-ray irradiation of thick polymer layers (a deep X-ray lithography procedure) results in a temperature distribution over the exposed area. The induced inhomogeneous temperature increase can reach several tens of degrees and it affects direct SU-8 polymerization depending on the microstructure size and area.


 

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