Characterization of non-stoichiometric co-sputtered Ba0.6Sr0.4(Ti1 − xFex)1 + xO3 − δ thin films for tunable passive microwave applications

  • chair:

    Stemme, F. / Geßwein, H. / Drahus, M. / Holländer, B. / Azucena, C. / Binder, J. / Eichel, R. / Haußelt, J. / Bruns, M. (2011)
  • place:

    Analytical and Bioanalytical Chemistry Journal (2011)
  • Date: 2011

  • Stemme, F. / Geßwein, H. / Drahus, M. / Holländer, B. / Azucena, C. / Binder, J. / Eichel, R. / Haußelt, J. / Bruns, M. (2011): „Characterization of non-stoichiometric co-sputtered Ba0.6Sr0.4(Ti1 − xFex)1 + xO3 − δ thin films for tunable passive microwave applications“. In: Analytical and Bioanalytical Chemistry Journal (2011)

Abstract

The fabrication of novel iron-doped barium strontium titanate thin films by means of radio frequency (RF) magnetron co-sputtering is shown. Investigations of the elemental composition and the dopant distribution in the thin films obtained by X-ray photoelectron spectroscopy, Rutherford backscattering spectrometry, and time-of-flight secondary ion mass spectroscopy reveal a homogeneous dopant concentration throughout the thin film.

The incorporation of the iron dopant and the temperature-dependent evolution of the crystal structure and morphology are analyzed by electron paramagnetic resonance spectroscopy, X-ray diffraction, Raman spectroscopy, atomic force microscopy, and scanning electron microscopy. In summary, these results emphasize the RF magnetron co-sputter process as a versatile way to fabricate doped thin films.

 

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